Магнетронное распыление |
✓ |
✓ |
— |
✓ |
✓ |
✓ |
— |
✓ |
✓ |
✓ |
✓ |
— |
— |
— |
Напыление углерода |
— |
✓ |
✓ |
— |
— |
✓ |
✓ |
— |
— |
— |
— |
— |
— |
— |
Термическое испарение |
— |
— |
— |
— |
— |
— |
— |
— |
— |
✓ |
✓ |
✓ |
– |
✓ |
Импульсное лазерное осаждение |
— |
— |
— |
— |
— |
— |
— |
— |
— |
— |
— |
— |
✓ |
✓ |
Напыление многослойных покрытий |
— |
— |
— |
— |
— |
— |
— |
✓ |
✓ |
✓ |
✓ |
✓ |
✓ |
✓ |
Распыление Co |
— |
— |
— |
— |
— |
— |
— |
✓ |
— |
✓ |
— |
✓ |
— |
✓ |
RF Power |
— |
— |
— |
— |
✓ |
— |
— |
✓ |
✓ |
✓ |
✓ |
— |
— |
— |
DC Power |
✓ |
✓ |
— |
✓ |
✓ |
✓ |
— |
✓ |
✓ |
✓ |
✓ |
— |
— |
— |
High Current Power |
— |
✓ |
✓ |
— |
— |
✓ |
✓ |
— |
— |
✓ |
✓ |
✓ |
— |
✓ |
Форвакуумный насос |
✓ |
✓ |
✓ |
✓ |
✓ |
✓ |
✓ |
✓ |
✓ |
✓ |
✓ |
✓ |
✓ |
✓ |
Турбомолекулярный насос |
— |
— |
— |
✓ |
✓ |
✓ |
✓ |
✓ |
✓ |
✓ |
✓ |
✓ |
✓ |
✓ |
Размер вакуумной камеры |
S |
S |
S |
S |
L |
S |
S |
L |
L |
L |
L |
L |
L |
L |
Количество мишеней |
1 |
1 |
— |
1 |
1 |
1 |
— |
3 |
3 |
3 |
3 |
3 |
3 |
3 |