Каталог
The DTT is a desk top, turbo molecular-pumped thermal evaporator for vacuum deposition of thin films. The triple-source evaporation with evaporation source (boat / basket / coil) selection system is ideal for deposition of multilayer or alloys. This vacuum evaporation system with its suitable dimensions is capable of reaching the desired pressure in a short time and coating process can take place within a few minutes. It is suitable for laboratory research applications.
Особенности
- Multi-layer thermal coatings
- Large format chamber
- High vacuum turbo pump [Pumping Speed 90 l/s 350 l/s; Ultimate Pressure 7 x10-6 Torr 7 x10-7 Torr]
- Two stage rotary vain backing pump, 4 m3/h
- Full range vacuum gauge
- Evaporation source (boat / basket / coil) selection for multilayer thin film deposition
- Co – evaporation to form alloy films (optional)
- Quartz crystal monitoring system for real time thickness measurement (1 nm precision)
- Manual or automatic Timed or Thickness deposition
- Intuitive touch screen to control the coating process and rapid data input
- User friendly software that can be updated via network
- Equipped with electronic shutter
- Equipped with rotary sample holder (optional)
- 2 inches, 500 °C substrate heater (optional
Применение
- Metal & dielectric Films
- Fabrication of thin film sensors
- Optical components
- Nano & Microelectronic
- Solar cells
Спецификация
- Multi boats, baskets and coils installation
- Records and plots coating parameters graphs
- Transfers the curves and deposition process data by USB port to PC
- Automatic control of power of coating independent of pressure
- Water cooled high current electrical feed through
- 0-100 high current, protected against short circuit, DC power supply
- Utilities: 220V/240V, 50/60HZ- 16A.
- Dimensions: 60 Cm H × 65 Cm W × 50 Cm D
- Shipping weight: ~ 60 kg
Опции и аксессуары
- High current power supply for co-evaporation
- Quartz crystal sensors
- Spare glass chamber
- Evaporation sources (boat / basket / coil)
- 2 inches, 500 °C substrate heater
- Sample rotation
- MFC
- Sealing gaskets